JPS643168Y2 - - Google Patents
Info
- Publication number
- JPS643168Y2 JPS643168Y2 JP15147983U JP15147983U JPS643168Y2 JP S643168 Y2 JPS643168 Y2 JP S643168Y2 JP 15147983 U JP15147983 U JP 15147983U JP 15147983 U JP15147983 U JP 15147983U JP S643168 Y2 JPS643168 Y2 JP S643168Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- magnetic pole
- objective lens
- sample holder
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 26
- 230000004308 accommodation Effects 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 description 20
- 230000004075 alteration Effects 0.000 description 11
- 230000005284 excitation Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15147983U JPS6059458U (ja) | 1983-09-30 | 1983-09-30 | 電子線装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15147983U JPS6059458U (ja) | 1983-09-30 | 1983-09-30 | 電子線装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6059458U JPS6059458U (ja) | 1985-04-25 |
| JPS643168Y2 true JPS643168Y2 (en]) | 1989-01-26 |
Family
ID=30335666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15147983U Granted JPS6059458U (ja) | 1983-09-30 | 1983-09-30 | 電子線装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6059458U (en]) |
-
1983
- 1983-09-30 JP JP15147983U patent/JPS6059458U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6059458U (ja) | 1985-04-25 |
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